ELS STUDY ON THE INITIAL-STAGE OF TI-SILICIDE FORMATION ON SI(111) AT ROOM-TEMPERATURE

被引：31

作者：

IWAMI, M

HASHIMOTO, S

HIRAKI, A

机构：

来源：

SOLID STATE COMMUNICATIONS | 1984年 / 49卷 / 05期

关键词：

D O I：

10.1016/0038-1098(84)90663-X

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

收藏

页码：459 / 462

页数：4

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