A REVIEW OF SUBMICRON LITHOGRAPHY

被引：21

作者：

SMITH, HI

机构：

来源：

SUPERLATTICES AND MICROSTRUCTURES | 1986年 / 2卷 / 02期

关键词：

D O I：

10.1016/0749-6036(86)90077-7

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：129 / 142

页数：14

共 32 条

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[2]

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[5]

EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718

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[8] DEEP-UV SPATIAL-FREQUENCY DOUBLING BY COMBINING MULTILAYER MIRRORS WITH DIFFRACTION GRATINGS [J].

HAWRYLUK, AM ;

SMITH, HI ;

EHRLICH, DJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :1200-1203

[9] ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING - EXPERIMENT [J].

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[10] EXPOSURE AND DEVELOPMENT MODELS USED IN ELECTRON-BEAM LITHOGRAPHY [J].

HAWRYLUK, RJ .

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