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PATTERNING CHARACTERISTICS OF ITO THIN-FILMS

被引：36
作者：
INOUE, M
MATSUOKA, T
FUJITA, Y
ABE, A
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 02期
关键词：
D O I：
10.1143/JJAP.28.274
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：274 / 278
页数：5
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