COMPOSITIONAL STUDY OF ULTRATHIN RAPIDLY REOXIDIZED NITRIDED OXIDES

被引：44

作者：

HORI, T ^{[1
]}

IWASAKI, H ^{[1
]}

OHMURA, T ^{[1
]}

SAMIZO, A ^{[1
]}

SATO, M ^{[1
]}

YOSHIOKA, Y ^{[1
]}

机构：

[1] MATSUSHITA TECHNORES INC,MORIGUCHI,OSAKA 570,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 02期

关键词：

D O I：

10.1063/1.343095

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：629 / 635

页数：7

共 25 条

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