共 15 条
[1]
THE THERMAL AND ION-ASSISTED REACTIONS OF GAAS(100) WITH MOLECULAR CHLORINE
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1986, 4 (04)
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DIRECTIONAL REACTIVE-ION-ETCHING OF INP WITH CL-2 CONTAINING GASES
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 19 (02)
:225-230
[5]
INSITU CHEMICAL ETCHING OF GAAS(001) AND INP(001) SUBSTRATES BY GASEOUS HCL PRIOR TO MOLECULAR-BEAM EPITAXY GROWTH
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1987, 5 (03)
:730-733
[6]
DEFECT STUDY IN GAAS BOMBARDED BY LOW-ENERGY FOCUSED ION-BEAMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (06)
:2124-2127
[8]
DRY ETCH INDUCED DAMAGE IN GAAS INVESTIGATED USING RAMAN-SCATTERING SPECTROSCOPY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1989, 7 (03)
:556-560
[9]
LISHAN DG, 1990, UNPUB 2ND INT C IND
[10]
CHEMICAL ETCHING OF GAAS AND INP BY CHLORINE - THE THERMODYNAMICALLY PREDICTED DEPENDENCE ON CL2 PRESSURE AND TEMPERATURE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1986, 4 (05)
:1216-1226