REACTIVE DC HIGH-RATE SPUTTERING AS PRODUCTION TECHNOLOGY

被引：96

作者：

SCHILLER, S

HEISIG, U

KORNDORFER, C

BEISTER, G

RESCHKE, J

STEINFELDER, K

STRUMPFEL, J

机构：

来源：

SURFACE & COATINGS TECHNOLOGY | 1987年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0257-8972(87)90206-4

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：405 / 423

页数：19

共 23 条

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