CRYSTALLOGRAPHIC ORIENTATION OF LASER-RECRYSTALLIZED GE FILMS ON FUSED QUARTZ

被引：5

作者：

NISHIOKA, T

SHINODA, Y

OHMACHI, Y

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 01期

关键词：

D O I：

10.1063/1.94134

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：92 / 94

页数：3

共 9 条

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[9] ELECTRON-BEAM RECRYSTALLIZATION OF CHEMICALLY VAPOR-DEPOSITED POLYSILICON FILMS [J].

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