A REVIEW OF EXCIMER LASER PROJECTION LITHOGRAPHY

被引：66

作者：

ROTHSCHILD, M

EHRLICH, DJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.584004

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1 / 17

页数：17

共 73 条

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[57] EXCIMER-LASER ETCHING OF DIAMOND AND HARD CARBON-FILMS BY DIRECT WRITING AND OPTICAL PROJECTION [J].

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ROTHSCHILD M, UNPUB

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