STRUCTURAL-ANALYSIS OF TIN FILMS BY SEEMANN-BOHLIN X-RAY-DIFFRACTION

被引：41

作者：

VALVODA, V

KUZEL, R

CERNY, R

RAFAJA, D

MUSIL, J

KADLEC, S

PERRY, AJ

机构：

[1] INST PHYS, CS-18040 PRAGUE 8, CZECHOSLOVAKIA

[2] GTE VALENITE CORP, TROY, MI 48084 USA

来源：

THIN SOLID FILMS | 1990年 / 193卷 / 1-2期

关键词：

D O I：

10.1016/S0040-6090(05)80050-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The accuracy of the Seemann-Bohlin method has been improved by using internal standards and a new calibration function. Experimental results illustrated by four typical example show that the stress and stress-free lattice parameter values determined by this method are crystallographically averaged quantities convenient for an overall characterization of lattice distortions. Combination of the method with the Bragg-Brentano technique and with sample annealing or substrate dissolution can be used for the separation of particular structural effects on the properties of TiN hard films.

引用

页码：401 / 408

页数：8

共 13 条

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