PHOTOASSISTED OXIDATION OF AMORPHOUS SIOX

被引：3

作者：

DEVINE, RAB

AUVERT, G

机构：

来源：

APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 23期

关键词：

D O I：

10.1063/1.97294

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1605 / 1607

页数：3

共 13 条

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