CLEANING AND NITRIDATION OF GAAS-SURFACES IN MULTIPOLAR PLASMAS INVESTIGATED BY INSITU PHOTOEMISSION AND SPECTROSCOPIC ELLIPSOMETRY

被引：23

作者：

FRIEDEL, P

LANDESMAN, JP

BOHER, P

SCHNEIDER, J

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.583741

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：1129 / 1134

页数：6

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