ANOMALOUS TRANSIENT DIFFUSION OF ION-IMPLANTED DOPANTS - A PHENOMENOLOGICAL MODEL

被引：36

作者：

MICHEL, AE

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90207-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：379 / 383

页数：5

共 28 条

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