MONTE-CARLO MODELING OF THE PHOTO AND AUGER-ELECTRON PRODUCTION IN X-RAY-LITHOGRAPHY WITH SYNCHROTRON RADIATION

被引：30

作者：

MURATA, K ^{[1
]}

KOTERA, M ^{[1
]}

NAGAMI, K ^{[1
]}

NAMBA, S ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT ELECT ENGN,TOYONAKA,OSAKA 560,JAPAN

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1985年 / 32卷 / 09期

关键词：

D O I：

10.1109/T-ED.1985.22182

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：1694 / 1703

页数：10

相关论文

共 29 条

[1] X-RAY-LITHOGRAPHY BY SYNCHROTRON RADIATION OF THE SOR-RING STORAGE RING
ARITOME, H
MATSUI, S
MORIWAKI, K
NAMBA, S
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1939 - 1941
[2] ARITOME H, 1978, 8TH P INT C EL ION B, P468
[3] DIFFRACTION EFFECTS ON PATTERN REPLICATION WITH SYNCHROTRON RADIATION
ATODA, N
KAWAKATSU, H
TANINO, H
ICHIMURA, S
HIRATA, M
HOH, K
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1267 - 1270
[4] BERGER MJ, 1964, NATL ACAD SCI NATL R, V1133, P205
[5] CALCULATION OF THE OPTIMUM ELECTRON-ENERGY OF A DEDICATED STORAGE RING FOR X-RAY-LITHOGRAPHY
BETZ, H
FEY, FK
HEUBERGER, A
TISCHER, P
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (04) : 693 - 698
[6] INVESTIGATIONS OF X-RAY-EXPOSURE USING PLANE SCANNING MIRRORS
BIEBER, M
SCHEUNEMANN, HU
BETZ, H
HEUBERGER, A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1271 - 1275
[7] COLBERT HH, 1974, SLL740012 SAND LAB R
[8] Duncumb P., 1968, NBS SPEC PUBL, V298, P133
[9] X-RAY REPLICATION OF MASKS USING SYNCHROTRON RADIATION PRODUCED BY ACO STORAGE RING
FAY, B
TROTEL, J
PETROFF, Y
PINCHAUX, R
THIRY, P
[J]. APPLIED PHYSICS LETTERS, 1976, 29 (06) : 370 - 372
[10] GOLDSTEIN JI, 1981, SCANNING ELECTRON MI, P619