CHEMICAL CHARACTERIZATION OF PLASMA-POLYMERIZED HEXAMETHYLDISILAZANE BY NUCLEAR ELASTIC RECOIL DETECTION

被引：11

作者：

GROLEAU, R

CURRIE, JF

WERTHEIMER, MR

KLEMBERGSAPIEHA, JE

WANG, KM

机构：

[1] ECOLE POLYTECH,COUCHES MINCES GRP,MONTREAL H3C 3A7,QUEBEC,CANADA

[2] ECOLE POLYTECH,DEPT ENGN PHYS,MONTREAL H3C 3A7,QUEBEC,CANADA

[3] SHANDONG UNIV,DEPT PHYS,JINAN,PEOPLES R CHINA

来源：

THIN SOLID FILMS | 1986年 / 136卷 / 01期

关键词：

INORGANIC COMPOUNDS - Polymerization - NUCLEAR INSTRUMENTATION - PLASMA DEVICES;

D O I：

10.1016/0040-6090(86)90111-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Chemical composition profiles of plasma-polymerized hexamethyldisilazane thin films, deposited in microwave discharges, were measured by elastic recoil detection (ERD). The main fabrication variable during film deposition was the substrate temperature, which was varied from 25 to 650 degree C. Hydrogen, carbon and silicon concentrations and profiles to a depth of roughly 1 mu m were measured by ERD. These concentrations were compared with results obtained by conventional chemical microanalysis, and agreement was found to be excellent. As in earlier work using other techniques, ERD confirmed the presence of a thin (approximately 50 nm) 'oligomeric' layer at the free surface of the films. Erosive radiation damage caused by the probing ion beam on the carbon and hydrogen profiles was observed and investigated.

引用

页码：85 / 92

页数：8

共 25 条

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