TEMPERATURE-DEPENDENT PREFERENTIAL SPUTTERING IN COSI2 AND NBSI2

被引：2

作者：

AFFOLTER, K

HAMDI, AH

NICOLET, MA

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1985年 / 37卷 / 01期

关键词：

D O I：

10.1007/BF00617864

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：19 / 23

页数：5

共 15 条

[1]

ANDERSEN HH, 1981, TOPICS APPL PHYS, V47, P169

[2]

Chu Wei-Kan, 1978, BACKSCATTERING SPECT, P54

[3] MODERN EXPERIMENTAL METHODS FOR SURFACE AND THIN-FILM CHEMICAL-ANALYSIS [J].

EVANS, CA ;

BLATTNER, RJ .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1978, 8 :181-214

[4] TEMPERATURE AND DIFFUSION EFFECTS IN PREFERENTIAL SPUTTERING OF CRSI2 [J].

FERNANDEZ, R ;

SHRETER, U ;

NICOLET, MA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :513-519

[5]

HAMDI AH, UNPUB THIN SOLID FIL

[6]

HAMDI AH, NUCL INSTR METH

[7] ON THE PROBLEM OF WHETHER MASS OR CHEMICAL BONDING IS MORE IMPORTANT TO BOMBARDMENT-INDUCED COMPOSITIONAL CHANGES IN ALLOYS AND OXIDES [J].

KELLY, R .

SURFACE SCIENCE, 1980, 100 (01) :85-107

[8] INTERACTIONS IN CO-SI THIN-FILM SYSTEM .1. KINETICS [J].

LAU, SS ;

MAYER, JW ;

TU, KN .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) :4005-4010

[9] SPUTTERING OF PTSI [J].

LIAU, ZL ;

MAYER, JW ;

BROWN, WL ;

POATE, JM .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (10) :5295-5305

[10] SURFACE-LAYER COMPOSITION CHANGES IN SPUTTERED ALLOYS AND COMPOUNDS [J].

LIAU, ZL ;

BROWN, WL ;

HOMER, R ;

POATE, JM .

APPLIED PHYSICS LETTERS, 1977, 30 (12) :626-628

← 1 2 →