INVESTIGATION OF THE SURFACE PHOTOCHEMICAL BASIS FOR METAL-FILM NUCLEATION IN LASER CHEMICAL VAPOR-DEPOSITION

被引：43

作者：

HIGASHI, GS

ROTHBERG, LJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 12期

关键词：

D O I：

10.1063/1.96307

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1288 / 1290

页数：3

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共 11 条

[1] UV PHOTODISSOCIATION AND PHOTODESORPTION OF ADSORBED MOLECULES .1. CH3BR ON LIF(001)
BOURDON, EBD
COWIN, JP
HARRISON, I
POLANYI, JC
SEGNER, J
STANNERS, CD
YOUNG, PA
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1984, 88 (25) : 6100 - 6103
[2] UV PHOTOLYSIS OF VANDERWAALS MOLECULAR FILMS
EHRLICH, DJ
OSGOOD, RM
[J]. CHEMICAL PHYSICS LETTERS, 1981, 79 (02) : 381 - 388
[3] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS
EHRLICH, DJ
OSGOOD, RM
DEUTSCH, TF
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) : 1233 - 1243
[4] SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION
EHRLICH, DJ
OSGOOD, RM
DEUTSCH, TF
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (11) : 946 - 948
[5] EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718
[6] CHEMICAL VAPOR-DEPOSITION ON SILICON - INSITU SURFACE STUDIES
FOORD, JS
JACKMAN, RB
[J]. CHEMICAL PHYSICS LETTERS, 1984, 112 (02) : 190 - 194
[7] GILGEN HH, 1984, 1984 P MAT RES SOC A, P53
[8] VIBRATIONAL SPECTROSCOPY OF GROWTH SURFACES DURING PHOTOCHEMICAL DEPOSITION OF ALUMINUM FROM TRIMETHYLALUMINUM VAPOR
HIGASHI, GS
ROTHBERG, LJ
FLEMING, CG
[J]. CHEMICAL PHYSICS LETTERS, 1985, 115 (02) : 167 - 172
[9] HIGASHI GS, J VAC SCI TECHNOL B
[10] PULSED OPTOACOUSTIC SPECTROSCOPY OF CONDENSED MATTER
PATEL, CKN
TAM, AC
[J]. REVIEWS OF MODERN PHYSICS, 1981, 53 (03) : 517 - 550