SPECIFIC CONTACT RESISTIVITY OF METAL-SEMICONDUCTOR CONTACTS - A NEW, ACCURATE METHOD LINKED TO SPREADING RESISTANCE

被引：18

作者：

CARVER, GP ^{[1
]}

KOPANSKI, JJ ^{[1
]}

NOVOTNY, DB ^{[1
]}

FORMAN, RA ^{[1
]}

机构：

[1] NBS, SEMICOND PROC RES LAB, RES PROGRAM, GAITHERSBURG, MD 20899 USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 04期

关键词：

D O I：

10.1109/16.2483

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：489 / 497

页数：9

共 35 条

[11] CONTACT RESISTANCE AND METHODS FOR ITS DETERMINATION [J].

COHEN, SS .

THIN SOLID FILMS, 1983, 104 (3-4) :361-379

[12] OHMIC CONTACTS FOR GAAS DEVICES [J].

COX, RH ;

STRACK, H .

SOLID-STATE ELECTRONICS, 1967, 10 (12) :1213-+

[13] CONTACT RESISTIVITY OF SILICON SILICIDE STRUCTURES FORMED BY THIN-FILM REACTIONS [J].

FINETTI, M ;

GUERRI, S ;

NEGRINI, P ;

SCORZONI, A ;

SUNI, I .

THIN SOLID FILMS, 1985, 130 (1-2) :37-45

[14] EXTRACTION OF THE MINIMUM SPECIFIC CONTACT RESISTIVITY USING KELVIN RESISTORS [J].

GILLENWATER, RL ;

HAFICH, MJ ;

ROBINSON, GY .

IEEE ELECTRON DEVICE LETTERS, 1986, 7 (12) :674-676

[15]

HENISH HK, 1984, SEMICONDUCTOR CONTAC, pCH1

[16] MODELING AND MEASUREMENT OF CONTACT RESISTANCES [J].

LOH, WM ;

SWIRHUN, SE ;

SCHREYER, TA ;

SWANSON, RM ;

SARASWAT, KC .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (03) :512-524

[17] THE SIDEWALL RESISTOR - A NOVEL TEST STRUCTURE TO RELIABLY EXTRACT SPECIFIC CONTACT RESISTIVITY [J].

LOH, WM ;

WRIGHT, PJ ;

SCHREYER, TA ;

SWIRHUN, SE ;

SARASWAT, KC ;

MEINDL, JD .

IEEE ELECTRON DEVICE LETTERS, 1986, 7 (08) :477-479

[18] ON THE OPTIMIZATION OF VLSI CONTACTS [J].

MADDOX, RL .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (03) :682-690

[19] AN IMPROVED TEST STRUCTURE AND KELVIN-MEASUREMENT METHOD FOR THE DETERMINATION OF INTEGRATED-CIRCUIT FRONT CONTACT RESISTANCE [J].

MAZER, JA ;

LINHOLM, LW ;

SAXENA, AN .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (02) :440-443

[20] ACCURACY OF THE 4-TERMINAL MEASUREMENT TECHNIQUES FOR DETERMINING CONTACT RESISTANCE [J].

NAEM, AA ;

SMITH, DA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (11) :2377-2380

← 1 2 3 4 →