EPITAXIAL NICKEL AND COBALT SILICIDE FORMATION BY RAPID THERMAL ANNEALING

被引:15
作者
CHEVALLIER, J
LARSEN, AN
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 39卷 / 02期
关键词
D O I
10.1007/BF00616832
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:141 / 145
页数:5
相关论文
共 17 条
  • [1] NUCLEATION-CONTROLLED THIN-FILM INTERACTIONS - SOME SILICIDES
    ANDERSON, R
    BAGLIN, J
    DEMPSEY, J
    HAMMER, W
    DHEURLE, F
    PETERSSON, S
    [J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 285 - 287
  • [2] SILICON METAL SILICIDE HETEROSTRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY
    BEAN, JC
    POATE, JM
    [J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 643 - 646
  • [3] BENARD J, 1964, OXYDATION METAUX, V2, P126
  • [4] DIFFUSION IN INTERMETALLIC COMPOUNDS WITH THE CAF2 STRUCTURE - A MARKER STUDY OF THE FORMATION OF NISI2 THIN-FILMS
    DHEURLE, F
    PETERSSON, S
    STOLT, L
    STRIZKER, B
    [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (08) : 5678 - 5681
  • [5] DHEURLE FM, UNPUB
  • [6] Harper R. E., 1984, Thin Films and Interfaces II. Proceedings of the Symposium, P105
  • [7] HILL C, 1984, MATER RES SOC S P, V13, P381
  • [8] EPITAXIAL PTSI AND PD2SI FORMED BY RAPID THERMAL ANNEALING
    LARSEN, AN
    CHEVALLIER, J
    PEDERSEN, AS
    [J]. MATERIALS LETTERS, 1985, 3 (5-6) : 242 - 246
  • [9] LARSEN AN, 1984, APPL PHYS A-MATER, V33, P51, DOI 10.1007/BF01197086
  • [10] LARSEN AN, 1984, MATERIALS RES SOC S, V23, P727