REACTIVE-MAGNETRON-SPUTTERED CHROMIUM CARBIDE FILMS

被引：20

作者：

AGARWAL, V ^{[1
]}

VANKAR, VD ^{[1
]}

CHOPRA, KL ^{[1
]}

机构：

[1] INDIAN INST TECHNOL,CTR MAT SCI & TECHNOL,NEW DELHI 110016,INDIA

来源：

THIN SOLID FILMS | 1989年 / 169卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90711-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：281 / 288

页数：8

共 19 条

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