ANNEALING AND OXIDATION EFFECTS AFTER CF4/H-2 DRY ETCHING FOR DAMAGE RECOVERY

被引：9

作者：

IKAWA, E

ENDO, N

TAJIMA, M

KUROGI, Y

机构：

来源：

SURFACE SCIENCE | 1986年 / 172卷 / 03期

关键词：

D O I：

10.1016/0039-6028(86)90511-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：763 / 772

页数：10

共 14 条

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