C-V ANALYSIS OF THE SCHOTTKY-BARRIER IN SEMI-INSULATING SEMICONDUCTORS

被引:9
作者
DUBECKY, F
OLEJNIOVA, B
机构
[1] Institute of Electrical Engineering, Slovak Academy of Sciences, CS-842 39 Bratislava
关键词
D O I
10.1063/1.347228
中图分类号
O59 [应用物理学];
学科分类号
摘要
We analyze the screening length and the base series admittance effect on the measurement of the barrier capacitance and voltage in semi-insulating (SI) semiconductors. Specific experimental conditions are summarized which enable the utilization of C-V analysis in SI materials. It is shown that under such experimental conditions the formula of Sah and Reddi for low-frequency C-V dependence can be applied for the calculation of the concentration of residual shallow impurities. These considerations are applied for the low-frequency C-V analysis of the Schottky barrier in SI GaAs:Cr formed by Au contact and the concentration of residual shallow donors is determined. Some limitations of the presented C-V analysis are discussed.
引用
收藏
页码:1769 / 1771
页数:3
相关论文
共 22 条
[1]   INVESTIGATION OF DEEP LEVELS IN HIGH-RESISTIVITY BULK MATERIALS BY PHOTOINDUCED CURRENT TRANSIENT SPECTROSCOPY .1. REVIEW AND ANALYSIS OF SOME BASIC PROBLEMS [J].
BALLAND, JC ;
ZIELINGER, JP ;
NOGUET, C ;
TAPIERO, M .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1986, 19 (01) :57-70
[2]  
Berman L. S., 1981, CAPACITANCE SPECTROS
[3]  
BERMAN LS, 1978, FIZ TEKH POLUPROV, V3, P604
[4]   TEMPERATURE DEPENDENCES OF ELECTRICAL PARAMETERS OF SEMIINSULATING GAAS DETERMINED FROM GALVANOMAGNETIC MEASUREMENTS [J].
BETKO, J ;
MERINSKY, K .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1986, 93 (02) :K205-K209
[5]   INVESTIGATION OF THE NEGATIVE PEAK IN PHOTOINDUCED TRANSIENT SPECTRA OF SEMI-INSULATING GALLIUM-ARSENIDE [J].
BLIGHT, SR ;
THOMAS, H .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (01) :215-226
[6]  
DUBECKY F, 1990, ACTA PHYS POL A, V77, P83
[7]  
DUBECKY F, 1990, 1989 P INT C SCI TEC
[8]   PHOTOINDUCED TRANSIENT SPECTROSCOPY PITS STUDY ON UNDOPED LEC GROWN SEMI-INSULATING GAAS [J].
FANG, ZQ ;
SHAN, L ;
SCHLESINGER, TE ;
MILNES, AG .
SOLID-STATE ELECTRONICS, 1989, 32 (05) :405-411
[9]   DEEP-LEVEL SPECTROSCOPY IN HIGH-RESISTIVITY MATERIALS [J].
HURTES, C ;
BOULOU, M ;
MITONNEAU, A ;
BOIS, D .
APPLIED PHYSICS LETTERS, 1978, 32 (12) :821-823
[10]   TRANSIENT PHOTOCONDUCTIVITY MEASUREMENTS IN SEMIINSULATING GAAS .1. AN ANALOG APPROACH [J].
KREMER, RE ;
ARIKAN, MC ;
ABELE, JC ;
BLAKEMORE, JS .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (06) :2424-2431