ELECTRICAL-CONDUCTION MECHANISM IN SEMIINSULATING POLYCRYSTALLINE SILICON FILMS

被引：17

作者：

COMIZZOLI, RB

OPILA, RL

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 01期

关键词：

D O I：

10.1063/1.338868

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：261 / 270

页数：10

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