INCREASED RANGE OF FERMI-LEVEL STABILIZATION ENERGY AT METAL MELT-GROWN GAAS(100) INTERFACES

被引:19
作者
CHANG, S
VITOMIROV, IM
BRILLSON, LJ
RIOUX, DF
KIRCHNER, PD
PETTIT, GD
WOODALL, JM
机构
[1] UNIV WISCONSIN,DEPT PHYS,MADISON,WI 53706
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 04期
关键词
D O I
10.1116/1.585751
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report a room temperature soft x-ray photoemission spectroscopic study of electronic barrier formation and chemistry at Al, Ag, and Au contacts with horizontal Bridgman-grown GaAs(100) surfaces, prepared by etching, heat-cleaning in situ, and As-capping. As reported previously, we observe a pronounced chemical reaction with formation of dissociated Ga for Al, a minimal interface reaction for Ag, and interdiffusion for Au. However, we find significant differences in the interface electronic barrier heights between the present metal/melt-grown GaAs(100) contacts and those made on cleaved (110) surfaces as well as on melt-grown (100) surfaces. We obtain Schottky barrier heights of 0.62, 0.85, and 1.03 eV respectively for Al, Ag, and Au/GaAs interfaces covering a range of 0.41eV-in contrast to the 0.2-0.3 eV range obtained earlier for both cleaved (110) and heat-cleaned (100) surfaces as well as the 0.7 eV range observed for metal/molecular beam epitaxy GaAs(100) interfaces. This intermediate behavior underscores the dependence of barrier height variation on different growth and interface processing techniques.
引用
收藏
页码:2129 / 2134
页数:6
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