THERMALLY STABLE OHMIC CONTACTS TO N-TYPE GAAS .3. GELNW AND NILNW CONTACT METALS

被引：51

作者：

MURAKAMI, M ^{[1
]}

SHIH, YC ^{[1
]}

PRICE, WH ^{[1
]}

WILKIE, EL ^{[1
]}

CHILDS, KD ^{[1
]}

PARKS, CC ^{[1
]}

机构：

[1] IBM CORP,E FISHKILL PROD ASSURANCE,HOPEWELL JUNCTION,NY 12533

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 04期

关键词：

D O I：

10.1063/1.341752

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1974 / 1982

页数：9

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[9] THERMALLY STABLE OHMIC CONTACT TO N-TYPE GAAS .1. MOGEW CONTACT METAL
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