COMPOSITION AND STRUCTURE OF THERMAL OXIDES OF INDIUM-PHOSPHIDE

被引:62
作者
NELSON, A
GEIB, K
WILMSEN, CW
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D O I
10.1063/1.332547
中图分类号
O59 [应用物理学];
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页码:4134 / 4140
页数:7
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[11]   THERMAL-OXIDATION OF INP [J].
WAGER, JF ;
WILMSEN, CW .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (01) :812-814
[12]   ANALYSIS OF OXIDE-SEMICONDUCTOR INTERFACE USING AUGER AND ESCA AS APPLIED TO INP AND GAAS [J].
WILMSEN, CW ;
KEE, RW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (04) :1513-1517
[13]   OXIDE LAYERS ON 3-5 COMPOUND SEMICONDUCTORS [J].
WILMSEN, CW .
THIN SOLID FILMS, 1976, 39 (DEC) :105-117
[14]  
WILMSEN CW, 1981, J VAC SCI TECHNOL, V19, P288
[15]   THERMAL-OXIDATION OF INP AND PROPERTIES OF OXIDE FILM - REPLY [J].
YAMAGUCHI, M .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) :1834-1835
[16]   THERMAL-OXIDATION OF INP AND PROPERTIES OF OXIDE FILM [J].
YAMAGUCHI, M ;
ANDO, K .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (09) :5007-5012
[17]   THERMAL-OXIDATION OF INP IN PHOSPHORUS PENTOXIDE VAPOR [J].
YAMAGUCHI, M .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (07) :4885-4887