THE ROLE OF FLUORINE IN IMPLANTED AMORPHOUS-SILICON

被引：11

作者：

WONG, SP

POON, MC

KWOK, HL

LAM, YW

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 10期

关键词：

D O I：

10.1149/1.2108364

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2172 / 2177

页数：6

共 43 条

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