THE GROWTH AND STRUCTURE OF RF SPUTTERED INDIUM TIN OXIDE THIN-FILMS

被引：4

作者：

SREENIVAS, K

MANSINGH, A

机构：

来源：

APPLICATIONS OF SURFACE SCIENCE | 1985年 / 22-3卷 / MAY期

关键词：

D O I：

10.1016/0378-5963(85)90200-4

中图分类号：

学科分类号：

摘要：

引用

页码：670 / 680

页数：11

共 13 条

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WEBB, JB ;

WILLIAMS, DF .

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CHOPRA, KL ;

MAJOR, S ;

PANDYA, DK .

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[4] X-RAY PHOTOEMISSION SPECTROSCOPY STUDIES OF SN-DOPED INDIUM-OXIDE FILMS [J].

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GOODENOUGH, JB .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) :3524-3531

[5]

FUZINAKA M, 1983, THIN SOLID FILMS, V10, P7

[6] EFFECTS OF HEAT-TREATMENT ON OPTICAL AND ELECTRICAL-PROPERTIES OF INDIUM-TIN OXIDE-FILMS [J].

HAINES, WG ;

BUBE, RH .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (01) :304-307

[7] STUDY OF FILMS HAVING BASE OF TIN OXIDE AND INDIUM OXIDE BY MEANS OF X-RAY-DIFFRACTION [J].

HECQ, M ;

DUBOIS, A ;

VANCAKEN.J .

THIN SOLID FILMS, 1973, 18 (01) :117-125

[8] PREPARATION AND PROPERTIES OF REACTIVELY CO-SPUTTERED TRANSPARENT CONDUCTING FILMS [J].

LEHMANN, HW ;

WIDMER, R .

THIN SOLID FILMS, 1975, 27 (02) :359-368

[9] THE DYNAMICS OF REACTIVE ION SPUTTERING OF SN-SB AND IN-SN ALLOYS IN AN AR-O2 ATMOSPHERE [J].

LEJA, E ;

KOLODZIEJ, A ;

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[10]

MAISSEL LI, 1970, HDB THIN FILM TECHNO, P9

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