INVESTIGATION OF ION-BEAM INDUCED MIXING IN PDSI, SNSI AND WSI SYSTEMS

被引：9

作者：

KURUP, MB

BHAGAWAT, A

PRASAD, KG

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 13卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(86)90550-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：473 / 478

页数：6

共 12 条

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[4]

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[5] ION MIXING [J].

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ANNUAL REVIEW OF MATERIALS SCIENCE, 1983, 13 :339-362

[6] ION-BEAM-INDUCED REACTIONS IN METAL-SEMICONDUCTOR AND METAL-METAL THIN-FILM STRUCTURES [J].

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LAU, SS ;

HUNG, LS .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :1-13

[7] TRANSITION-METAL SILICIDES [J].

MURARKA, SP .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1983, 13 :117-137

[8]

NICOLET MA, 1983, MATER RES SOC S P, V27, P3

[9]

PRASAD KG, 1985, NUCL INSTR METH B

[10] REFRACTORY-METAL SILICIDE FORMATION INDUCED BY AS+ IMPLANTATION [J].

TSAI, MY ;

PETERSSON, CS ;

DHEURLE, FM ;

MANISCALCO, V .

APPLIED PHYSICS LETTERS, 1980, 37 (03) :295-298

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