FORMATION KINETICS OF NIOBIUM AND MOLYBDENUM SILICIDES INDUCED BY ION-BOMBARDMENT

被引：13

作者：

KANAYAMA, T

TANOUE, H

TSURUSHIMA, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 03期

关键词：

D O I：

10.1143/JJAP.23.277

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：277 / 282

页数：6

共 25 条

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