FORMATION KINETICS OF NIOBIUM AND MOLYBDENUM SILICIDES INDUCED BY ION-BOMBARDMENT

被引:13
作者
KANAYAMA, T
TANOUE, H
TSURUSHIMA, T
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 03期
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D O I
10.1143/JJAP.23.277
中图分类号
O59 [应用物理学];
学科分类号
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页码:277 / 282
页数:6
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