TEMPERATURE-DEPENDENT CHEMICAL AND ELECTRONIC-STRUCTURE OF RECONSTRUCTED GAAS (100) SURFACES

被引:64
作者
VITOMIROV, IM [1 ]
RAISANEN, AD [1 ]
FINNEFROCK, AC [1 ]
VITURRO, RE [1 ]
BRILLSON, LJ [1 ]
KIRCHNER, PD [1 ]
PETTIT, GD [1 ]
WOODALL, JM [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 04期
关键词
D O I
10.1116/1.586219
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Low-energy electron diffraction, soft x-ray photoemission, cathodoluminescence (CL), and Auger electron spectroscopies have been performed to investigate the geometric, chemical, and electronic properties of GaAs (100) surfaces as a function of annealing temperature and surface reconstruction. These measurements indicate gradual changes in surface geometry, composition, deep level CL features, and Fermi-level (E(F)) position with increasing temperature of surface preparation. In contrast, it was observed that pronounced changes in the surface ionization potential and work function between different surface reconstructions. For most of the desorption temperatures and surface reconstructions, the secondary electron emission exhibits characteristic double onsets, possibly due to the existence of differently reconstructed patches on the surface. The implications of these variations in the surface chemical and electronic structure of GaAs (100) surfaces on their metal contact properties. It was concluded that (a) unique characterization of these surfaces requires measurements of geometric ordering, chemical composition and bonding, and deep level emission in the band gap, and (b) the correlation of the surface geometry with chemical and electronic surface and interface structure points to the central role of surface preparation in achieving controlled Schottky barrier behavior.
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收藏
页码:1898 / 1903
页数:6
相关论文
共 26 条
[1]   RECONSTRUCTIONS OF GAAS AND AIAS SURFACES AS A FUNCTION OF METAL TO AS RATIO [J].
BACHRACH, RZ ;
BAUER, RS ;
CHIARADIA, P ;
HANSSON, GV .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :335-343
[2]   THE STRUCTURE AND PROPERTIES OF METAL-SEMICONDUCTOR INTERFACES [J].
Brillson, L. J. .
SURFACE SCIENCE REPORTS, 1982, 2 (02) :123-326
[3]   CATHODOLUMINESCENCE SPECTROSCOPY OF METAL-SEMICONDUCTOR INTERFACE STRUCTURES [J].
BRILLSON, LJ ;
VITURRO, RE ;
SHAW, JL ;
RICHTER, HW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1437-1445
[4]  
BRILLSON LJ, 1988, SCANNING MICROSCOPY, V2, P789
[5]   WORK FUNCTION, ELECTRON-AFFINITY, AND BAND BENDING AT DECAPPED GAAS(100) SURFACES [J].
CHEN, W ;
DUMAS, M ;
MAO, D ;
KAHN, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04) :1886-1890
[7]   MANY-ELECTRON SINGULARITY IN X-RAY PHOTOEMISSION AND X-RAY LINE SPECTRA FROM METALS [J].
DONIACH, S ;
SUNJIC, M .
JOURNAL OF PHYSICS PART C SOLID STATE PHYSICS, 1970, 3 (02) :285-&
[8]   DRAMATIC WORK FUNCTION VARIATIONS OF MOLECULAR-BEAM EPITAXIALLY GROWN GAAS(100) SURFACES [J].
DUSZAK, R ;
PALMSTROM, CJ ;
FLOREZ, LT ;
YANG, YN ;
WEAVER, JH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04) :1891-1897
[9]   IONIZATION-ENERGY DEPENDENCE ON GAAS(001) SURFACE SUPERSTRUCTURE MEASURED BY PHOTOEMISSION-YIELD SPECTROSCOPY [J].
HIROSE, K ;
FOXMAN, E ;
NOGUCHI, T ;
UDA, M .
PHYSICAL REVIEW B, 1990, 41 (09) :6076-6078
[10]   QUANTITATIVE-ANALYSIS OF SYNCHROTRON RADIATION PHOTOEMISSION CORE LEVEL DATA [J].
JOYCE, JJ ;
DELGIUDICE, M ;
WEAVER, JH .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1989, 49 (01) :31-45