LTMBE GAAS - PRESENT STATUS AND PERSPECTIVES

被引:42
作者
WITT, GL
机构
[1] AFOSR/NE, Bolling AFB
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1993年 / 22卷 / 01期
关键词
D O I
10.1016/0921-5107(93)90215-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
When GaAs is grown via MBE at 200 degrees C (compared to the normal 580-600 degrees C), the films manifest a remarkable set of structural, electrical and optical properties. As grown, LT GaAs (as it is commonly known) has an excess of As, contains a high concentration of point defects, displays hopping band conductivity and shows little, if any, photoluminescence. After a 600 degrees C anneal, the layers have a relaxed lattice constant, are highly resistive and contain a distribution of As precipitates. The point defect concentration diminishes by several orders of magnitude. The photo-induced carrier lifetime typically is of the order of 200 fs. This account will review what is known about these interesting materials, discuss models to explain the transport properties and mention potential applications.
引用
收藏
页码:9 / 15
页数:7
相关论文
共 26 条
[1]   HIGH-BREAKDOWN-VOLTAGE MESFET WITH A LOW-TEMPERATURE-GROWN GAAS PASSIVATION LAYER AND OVERLAPPING GATE STRUCTURE [J].
CHEN, CL ;
MAHONEY, LJ ;
MANFRA, MJ ;
SMITH, FW ;
TEMME, DH ;
CALAWA, AR .
IEEE ELECTRON DEVICE LETTERS, 1992, 13 (06) :335-337
[2]  
CLAVERIE P, 1993, APPL PHYS LETT, V62, P1638
[3]   PHOSPHORUS ANTISITE DEFECTS IN LOW-TEMPERATURE INP [J].
DRESZER, P ;
CHEN, WM ;
SEENDRIPU, K ;
WOLK, JA ;
WALUKIEWICZ, W ;
LIANG, BW ;
TU, CW ;
WEBER, ER .
PHYSICAL REVIEW B, 1993, 47 (07) :4111-4114
[4]   LIMITED THICKNESS EPITAXY IN GAAS MOLECULAR-BEAM EPITAXY NEAR 200-DEGREES-C [J].
EAGLESHAM, DJ ;
PFEIFFER, LN ;
WEST, KW ;
DYKAAR, DR .
APPLIED PHYSICS LETTERS, 1991, 58 (01) :65-67
[5]   SUBPICOSECOND CARRIER LIFETIME IN GAAS GROWN BY MOLECULAR-BEAM EPITAXY AT LOW-TEMPERATURES [J].
GUPTA, S ;
FRANKEL, MY ;
VALDMANIS, JA ;
WHITAKER, JF ;
MOUROU, GA ;
SMITH, FW ;
CALAWA, AR .
APPLIED PHYSICS LETTERS, 1991, 59 (25) :3276-3278
[6]  
KAMINSKA M, 1992, MATER SCI FORUM, V83, P1033, DOI 10.4028/www.scientific.net/MSF.83-87.1033
[7]   STRUCTURE AND THERMAL-STABILITY OF CU-IN PRECIPITATES AND THEIR ROLE IN THE SEMIINSULATING BEHAVIOR OF INPCU [J].
LEON, RP ;
WERNER, P ;
EDER, C ;
WEBER, ER .
APPLIED PHYSICS LETTERS, 1992, 61 (21) :2545-2547
[8]  
LILIENTALWEBER Z, 1992, MATER SCI FORUM, V83, P1045, DOI 10.4028/www.scientific.net/MSF.83-87.1045
[9]   ON COMPENSATION AND CONDUCTIVITY MODELS FOR MOLECULAR-BEAM-EPITAXIAL GAAS GROWN AT LOW-TEMPERATURE [J].
LOOK, DC .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (06) :3148-3151
[10]   MOLECULAR-BEAM EPITAXIAL GAAS GROWN AT LOW-TEMPERATURES [J].
LOOK, DC .
THIN SOLID FILMS, 1993, 231 (1-2) :61-73