SCHOTTKY-BARRIER HEIGHT CONTROL BY USING KNOCK-ON EFFECT IN ION-IMPLANTATION

被引：4

作者：

ISHIWARA, H ^{[1
]}

FURUKAWA, S ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,GRAD SCH SCI & ENGN,TOKOHAMA 227,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1977年 / 16卷

关键词：

D O I：

10.7567/JJAPS.16S1.53

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：53 / 56

页数：4

相关论文

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