TEM OBSERVATIONS OF INITIAL CRYSTALLIZATION STATES FOR LPCVD SI FILMS

被引：13

作者：

ADACHI, E

AOYAMA, T

KONISHI, N

SUZUKI, T

OKAJIMA, Y

MIYATA, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 10期

关键词：

D O I：

10.1143/JJAP.27.L1809

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1809 / L1811

页数：3

共 8 条

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[6] LOW-TEMPERATURE CRYSTALLIZATION OF HYDROGENATED AMORPHOUS-SILICON FILMS IN CONTACT WITH EVAPORATED ALUMINUM ELECTRODES [J].

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