SIMULATION OF RECOVERY KINETICS IN SI(001) MOLECULAR-BEAM EPITAXY

被引：27

作者：

CLARKE, S

WILBY, MR

VVEDENSKY, DD

KAWAMURA, T

机构：

[1] UNIV LONDON IMPERIAL COLL SCI & TECHNOL,SEMICOND MAT INTERDISCIPLINARY RES CTR,LONDON SW7 2BZ,ENGLAND

[2] YAMANASHI UNIV,KOFU,YAMANASHI 400,JAPAN

来源：

PHYSICAL REVIEW B | 1989年 / 40卷 / 02期

关键词：

D O I：

10.1103/PhysRevB.40.1369

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1369 / 1372

页数：4

共 18 条

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