THERMODYNAMIC CONSIDERATIONS OF THERMAL-OXIDATION OF METAL SILICIDES

被引：7

作者：

LEE, HG

机构：

[1] Department of Mining and Metallurgical Engineering, The University of Queensland, St. Lucia

来源：

THIN SOLID FILMS | 1992年 / 216卷 / 02期

关键词：

D O I：

10.1016/0040-6090(92)90842-Y

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The thermal oxidation processes of metal silicides are discussed in terms of "stable phase diagrams." Thermodynamic principles used in the construction of the diagrams are described, and diagrams for Ta-Si-O, W-Si-O and Ti-Si-O are presented with discussion. These diagrams are used in predicting and interpreting the oxidation process. Experimental results reported in the literature are explained using the diagrams.

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页码：230 / 234

页数：5

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