ON THE MECHANISM OF GROWTH-RATE ENHANCEMENT BY PHOTOCATALYSIS IN METALORGANIC VAPOR-PHASE EPITAXY OF ZNSE

被引：15

作者：

YOSHIKAWA, A

OKAMOTO, T

机构：

[1] Department of Electrical and Electronics Engineering, Faculty of Engineering, Chiba University, Chiba-shi, 260

来源：

JOURNAL OF CRYSTAL GROWTH | 1992年 / 117卷 / 1-4期

关键词：

Catalysis - Photochemical Reactions - Crystals - Epitaxial Growth - Organometallics - Photolysis - Semiconducting Intermetallics - Semiconducting Zinc Compounds - Chemical Vapor Deposition;

D O I：

10.1016/0022-0248(92)90725-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

The growth and/or reaction mechanism of photoassisted MOVPE of ZnSe using DMZn and DMSe has been studied. Some evidence is shown which indicates that the dissociation of Se sources, i.e., DMSe or H2Se, may be initiated by the effect of photoinduced excess holes at the ZnSe surface, and this is the rate-limiting reaction for the growth rate enhancement under photo-irradiation. Furthermore, a brief discussion is provided concerning how the excess holes contribute to the dissociation of these Se sources at the surface. Some plausible reaction models will be proposed.

引用

页码：107 / 110

页数：4

共 8 条

[1] GROWTH-RATE ENHANCEMENT BY XENON LAMP IRRADIATION IN ORGANOMETALLIC VAPOR-PHASE EPITAXY OF ZNSE [J].

FUJITA, S ;

TANABE, A ;

SAKAMOTO, T ;

ISEMURA, M ;

FUJITA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (12) :L2000-L2002

[2]

HESLOP RB, 1976, INORGANIC CHEM, pCH8

[3] EFFECTS OF SUBSTRATE MATERIALS AND THEIR PROPERTIES ON PHOTOASSISTED METALORGANIC VAPOR-PHASE EPITAXY OF ZNSE [J].

OKAMOTO, T ;

YOSHIKAWA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (2A) :L156-L159

[4] THE DEPENDENCE OF LIGHT-INTENSITY ON SURFACE-MORPHOLOGY AND IMPURITY INCORPORATION FOR ZNSE GROWN BY PHOTO-ASSISTED MOVPE [J].

YASUDA, T ;

KOYAMA, Y ;

WAKITANI, J ;

YOSHINO, J ;

KUKIMOTO, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (09) :L1628-L1630

[5] EFFECTS OF AR ION LASER IRRADIATION ON MOVPE OF ZNSE USING DMZN AND DMSE AS REACTANTS [J].

YOSHIKAWA, A ;

OKAMOTO, T ;

FUJIMOTO, T .

JOURNAL OF CRYSTAL GROWTH, 1991, 107 (1-4) :653-658

[6] AR-ION LASER-ASSISTED MOVPE OF ZNSE USING DMZN AND DMSE AS REACTANTS [J].

YOSHIKAWA, A ;

OKAMOTO, T ;

FUJIMOTO, T ;

ONOUE, K ;

YAMAGA, S ;

KASAI, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (02) :L225-L228

[7] AR ION LASER IRRADIATION EFFECTS ON THE MOVPE GROWTH OF ZNSE USING DIMETHYL ZINC AND HYDROGEN SELENIDE AS REACTANTS [J].

YOSHIKAWA, A ;

OKAMOTO, T .

JOURNAL OF CRYSTAL GROWTH, 1991, 115 (1-4) :274-278

[8]

YOSHIKAWA A, 1989, SPIE P, V1190, P25

← 1 →