ELLIPSOMETRY

被引：5

作者：

KING, RJ ^{[1
]}

机构：

[1] NATL PHYS LAB,DIV OPTICAL METROL,TEDDINGTON,MIDDLESEX TW11,ENGLAND

来源：

VACUUM | 1972年 / 22卷 / 10期

关键词：

D O I：

10.1016/0042-207X(72)90228-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：493 / 495

页数：3

共 17 条

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J].

ARCHER, RJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) :970-&

[2]

ARCHER RJ, 1964, NBS256 MISC PUBL, P255

[3] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&

[4] A RADIOTRACER STUDY OF AN OPTICAL METHOD FOR MEASURING ADSORPTION [J].

BARTELL, LS ;

BETTS, JF .

JOURNAL OF PHYSICAL CHEMISTRY, 1960, 64 (08) :1075-1076

[5] ELLIPSOMETRY IN SUB-MONOLAYER REGION [J].

BOOTSMA, GA ;

MEYER, F .

SURFACE SCIENCE, 1969, 14 (01) :52-&

[6] EFFECT OF THIN SURFACE FILM ON ELLIPSOMETRIC DETERMINATION OF OPTICAL CONSTANTS [J].

BURGE, DK ;

BENNETT, HE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1964, 54 (12) :1428-&

[7] ELLIPSOMETRY-LEED STUDY OF ADSORPTION OF OXYGEN ON (011) TUNGSTEN [J].

CARROLL, JJ ;

MELMED, AJ .

SURFACE SCIENCE, 1969, 16 :251-&

[8] ELLIPSOMETRY APPLIED TO FILMS ON DIELECTRIC SUBSTRATES [J].

KING, RJ ;

DOWNS, MJ .

SURFACE SCIENCE, 1969, 16 :288-&

[9] OPTICAL MEASUREMENTS ON THIN FILMS OF CONDENSED GASES AT LOW TEMPERATURES [J].

KRUGER, J ;

AMBS, WJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1959, 49 (12) :1195-1198

[10] ANALYSES AND CORRECTIONS OF INSTRUMENTAL ERRORS IN ELLIPSOMETRY [J].

MCCRACKIN, FL .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (01) :57-+

← 1 2 →