MIRROR QUALITY AND EFFICIENCY IMPROVEMENTS OF REFLECTIVE SPATIAL LIGHT MODULATORS BY THE USE OF DIELECTRIC COATINGS AND CHEMICAL-MECHANICAL POLISHING

被引：19

作者：

OHARA, A ^{[1
]}

HANNAH, JR ^{[1
]}

UNDERWOOD, I ^{[1
]}

VASS, DG ^{[1
]}

HOLWILL, RJ ^{[1
]}

机构：

[1] UNIV EDINBURGH, EDINBURGH MICROFABRICAT FACIL, DEPT ELECT ENGN, EDINBURGH EH9 3JL, MIDLOTHIAN, SCOTLAND

来源：

APPLIED OPTICS | 1993年 / 32卷 / 28期

关键词：

SPATIAL LIGHT MODULATORS; HILLOCKS; PLANARIZATION;

D O I：

10.1364/AO.32.005549

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

To date, silicon backplane spatial light modulators have been characterized by poor-quality mirrors. Hillock formation during metal sintering has been identified as the source of this problem. Here hillock elimination is achieved by constraining the metal with a low-temperature plasma-enhanced chemical-vapor deposition silicon dioxide coating. A double-layer metallization procedure increases the silicon area available for circuitry and improves the mirror fill factor. Second-layer metal mirrors require a flat, intermediate dielectric substrate. Chemical-mechanical polishing is demonstrated to provide the flatness necessary to achieve high optical quality.

引用

页码：5549 / 5556

页数：8

共 21 条

[1] LIQUID-CRYSTAL INTEGRATED SILICON SPATIAL LIGHT-MODULATOR [J].