REAL-TIME OPTICAL DIAGNOSTICS FOR EPITAXIAL-GROWTH

被引：62

作者：

ASPNES, DE

机构：

[1] Department of Physics, North Carolina State University, Raleigh

来源：

SURFACE SCIENCE | 1994年 / 307卷

关键词：

D O I：

10.1016/0039-6028(94)91533-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Various optical diagnostics are being developed to meet new challenges in epitaxial growth. Layer thicknesses and compositions, the primary parameters needed for growth control, can be obtained with bulk-oriented probes such as reflectometry and ellipsometry. New derivative algorithms for determining near-surface dielectric properties and compositions from kinetic ellipsometric and complex-reflectometric data have made possible closed-loop feedback control of alloy structures, including compositionally graded structures. New information about the kinetics and chemistry of growth is being obtained by surface-oriented probes such as laser light scattering (LLS), surface photoabsorption (SPA), and reflectance-difference (-anisotropy) spectroscopy (RDS/RAS). Examples are provided, and likely directions of further progress discussed.

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页码：1017 / 1027

页数：11

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