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DOPANT DIFFUSION IN SILICON .3. ACCEPTORS

被引：47
作者：
GHOSHTAG.RN
机构：
来源：
PHYSICAL REVIEW B-SOLID STATE | 1971年 / 3卷 / 08期
关键词：
D O I：
10.1103/PhysRevB.3.2507
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：2507 / &
相关论文
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