THE ROLE OF GAS-ADSORPTION IN ION-BEAM-INDUCED DEPOSITION OF GOLD

被引：16

作者：

DUBNER, AD ^{[1
]}

WAGNER, A ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,DIV RES,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343512

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：870 / 874

页数：5

共 16 条

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