ATOMIC INTER-DIFFUSION AT AU-GAAS INTERFACES STUDIED WITH AL INTERLAYERS

被引:30
作者
BRILLSON, LJ [1 ]
BAUER, RS [1 ]
BACHRACH, RZ [1 ]
HANSSON, G [1 ]
机构
[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304
来源
PHYSICAL REVIEW B | 1981年 / 23卷 / 12期
关键词
D O I
10.1103/PhysRevB.23.6204
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:6204 / 6215
页数:12
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