DIELECTRIC CHARACTERISTICS OF FLUORINATED ULTRADRY SIO2

被引：55

作者：

NISHIOKA, Y

OHJI, Y

MUKAI, K

SUGANO, T

WANG, Y

MA, TP

机构：

[1] UNIV TOKYO,DEPT ELECTR ENGN,BUNKYO KU,TOKYO 113,JAPAN

[2] YALE UNIV,DEPT ELECT ENGN,NEW HAVEN,CT 06520

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 12期

关键词：

D O I：

10.1063/1.101479

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1127 / 1129

页数：3

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