PREPARATION OF A BAF2/CAF2 SLAB OPTICAL WAVE-GUIDE BY CHEMICAL-VAPOR-DEPOSITION

被引：2

作者：

SATO, H

机构：

[1] NTT Opto-Electronics Laboratories, Tokai, Ibaraki

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1994年 / 33卷 / 3A期

关键词：

SLAB OPTICAL WAVE-GUIDE; BARIUM FLUORIDE; THIN FILM; CVD; CALCIUM FLUORIDE SUBSTRATE; BARIUM BETA-DIKETONE CHELATE;

D O I：

10.1143/JJAP.33.L368

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Single crystal BaF2 0.6-3.8 mum thick were grown on CaF2 substrates by chemical vapor deposition. Fluorinated Barium beta-diketone chelates; Ba(ofhd)2 or Ba(dfhd)2 were used as the source material and oxygen was introduced to complete the fluorination of the barium precursor. The BaF2/CaF2 structure functioned as a slab optical waveguide and the losses were mainly dependent on the film thickness and the surface morphologies. The minimum loss was about 1 dB/cm at 633 nm.

引用

页码：L368 / L370

页数：3

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