CRYSTALLOGRAPHIC TARGET EFFECTS IN MAGNETRON SPUTTERING

被引：29

作者：

WICKERSHAM, CE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574531

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1755 / 1758

页数：4

共 12 条

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