SILICON WAFER ANNEALING EFFECT IN LOOP DEFECT GENERATION

[1] ABE T, 1967, DENKI KAGAKU, V35, P149

[2] INFLUENCE OF BULK AND SURFACE PROPERTIES ON IMAGE SENSING SILICON DIODE ARRAYS [J]. BELL SYSTEM TECHNICAL JOURNAL, 1968, 47 (09): : 1827 - +

[3] ANNEALING BEHAVIOR AND ETCHING PHENOMENA OF MICRODEFECTS IN DISLOCATION-FREE FLOAT-ZONE SILICON [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 7 (02): : 577 - &

[4] FISHER AW, 1966, ELECTROCHEM SOC, V113, P360

[5] HU SM, 1972, J APPL PHYS, V43, P2467

[6] IIZUKA T, 1965, JPN J APPL PHYS, V4, P1018

[7] VACANCY CLUSTERS IN DISLOCATION-FREE SILICON [J]. APPLIED PHYSICS LETTERS, 1970, 16 (03) : 100 - &

[8] SPOTTY DEFECTS IN OXIDIZED FLOATING-ZONED DISLOCATION-FREE SILICON CRYSTALS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1972, 11 (02) : 197 - &

[9] COPPER PRECIPITATE COLONIES IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (04) : 1835 - &

[10] PLASKETT TS, 1965, T METALL SOC AIME, V233, P809

[1] ABE T, 1967, DENKI KAGAKU, V35, P149

[2] INFLUENCE OF BULK AND SURFACE PROPERTIES ON IMAGE SENSING SILICON DIODE ARRAYS [J]. BELL SYSTEM TECHNICAL JOURNAL, 1968, 47 (09): : 1827 - +

[3] ANNEALING BEHAVIOR AND ETCHING PHENOMENA OF MICRODEFECTS IN DISLOCATION-FREE FLOAT-ZONE SILICON [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 7 (02): : 577 - &

[4] FISHER AW, 1966, ELECTROCHEM SOC, V113, P360

[5] HU SM, 1972, J APPL PHYS, V43, P2467

[6] IIZUKA T, 1965, JPN J APPL PHYS, V4, P1018

[7] VACANCY CLUSTERS IN DISLOCATION-FREE SILICON [J]. APPLIED PHYSICS LETTERS, 1970, 16 (03) : 100 - &

[8] SPOTTY DEFECTS IN OXIDIZED FLOATING-ZONED DISLOCATION-FREE SILICON CRYSTALS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1972, 11 (02) : 197 - &

[9] COPPER PRECIPITATE COLONIES IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (04) : 1835 - &

[10] PLASKETT TS, 1965, T METALL SOC AIME, V233, P809