DESIGN AND OPERATION OF A VALVED SOLID-SOURCE AS2 OVEN FOR MOLECULAR-BEAM EPITAXY

被引：40

作者：

MILLER, DL

BOSE, SS

SULLIVAN, GJ

机构：

[1] PENN STATE UNIV,CTR ELECTR MAT & PROC,UNIVERSITY PK,PA 16802

[2] ROCKWELL INT CORP,CTR SCI,THOUSAND OAKS,CA 91360

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 02期

关键词：

D O I：

10.1116/1.585060

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：311 / 315

页数：5

共 22 条

[1] ON THE USE OF ASH3 IN THE MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS [J].

CALAWA, AR .

APPLIED PHYSICS LETTERS, 1981, 38 (09) :701-703

[2] TIN PHOSPHIDE AS A PHOSPHORUS BEAM SOURCE FOR MOLECULAR-BEAM EPITAXY [J].

CHAI, YG .

APPLIED PHYSICS LETTERS, 1984, 45 (09) :985-987

[3] SURFACE STRUCTURES AND PHOTOLUMINESCENCE OF MOLECULAR BEAM EPITAXIAL FILMS OF GAAS [J].

CHO, AY ;

HAYASHI, I .

SOLID-STATE ELECTRONICS, 1971, 14 (02) :125-&

[4]

FERNANDEZ R, 1989, APR P MAT RES SOC SP

[5]

FERNANDEZ R, 1989, MATER RES SOC S SER, V145

[6] EVAPORATION OF GAAS UNDER EQUILIBRIUM AND NONEQUILIBRIUM CONDITIONS USING A MODULATED BEAM TECHNIQUE [J].

FOXON, CT ;

HARVEY, JA ;

JOYCE, BA .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1973, 34 (10) :1693-&

[7] DIMER ARSENIC SOURCE USING A HIGH-EFFICIENCY CATALYTIC CRACKING OVEN FOR MOLECULAR-BEAM EPITAXY [J].

GARCIA, JC ;

BARSKI, A ;

CONTOUR, JP ;

MASSIES, J .

APPLIED PHYSICS LETTERS, 1987, 51 (08) :593-595

[8] LARGE CAPACITY AS2 SOURCE FOR MOLECULAR-BEAM EPITAXY [J].

HENDERSON, T ;

KOPP, W ;

FISCHER, R ;

KLEM, J ;

MORKOC, H ;

ERICKSON, LP ;

PALMBERG, PW .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (11) :1763-1766

[9] MOLECULAR-BEAM EPITAXY OF IN0.53GA0.47AS AND INP ON INP BY USING CRACKER CELLS AND GAS CELLS [J].

HUET, D ;

LAMBERT, M ;

BONNEVIE, D ;

DUFRESNE, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (03) :823-829

[10] ON THE DESIGN AND CHARACTERIZATION OF A NOVEL ARSINE CRACKING FURNACE UTILIZING CATALYTIC DECOMPOSITION OF ASH3 TO YIELD A PURELY MONOMERIC SOURCE OF ARSENIC FOR MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS [J].

KAPITAN, LW ;

LITTON, CW ;

CLARK, GC ;

COLTER, PC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (02) :280-284

← 1 2 3 →