REFRACTIVE-INDEX, RELAXATION-TIMES AND THE VISCOELASTIC MODEL IN DRY-GROWN SIO2-FILMS ON SI

被引:63
作者
LANDSBERGER, LM [1 ]
TILLER, WA [1 ]
机构
[1] STANFORD UNIV, DEPT MAT SCI & ENGN, STANFORD, CA 94305 USA
关键词
D O I
10.1063/1.98642
中图分类号
O59 [应用物理学];
学科分类号
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页码:1416 / 1418
页数:3
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