ADVANTAGES OF DYNAMIC ION-BEAM MIXING

被引:23
作者
KIUCHI, M
机构
[1] Government Industrial Research Institute, Osaka, Ikeda, Osaka, 563, Midorigaoka
关键词
D O I
10.1016/0168-583X(93)90796-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Dynamic ion beam mixing is a useful technique to produce hard coatings for tribological applications. In this method, metals are deposited with simultaneous ion beam irradiation. By this method film synthesis of new materials has become possible. The ion beam mixing effect induces an intermixed layer. Crystallization under this process turned out to be mainly controlled by two mechanisms, ion beam induced crystallization and ion beam enhanced crystallization.
引用
收藏
页码:1343 / 1348
页数:6
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